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Second-generation semiconductor material-silane special gas-special gas supply system

(Summary description)

Second-generation semiconductor material-silane special gas-special gas supply system

(Summary description)

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Electronic gas, an important raw material for the semiconductor industry

 

Electronic special gas (referred to as electronic special gas) is an important branch of special gas, which is an indispensable raw material for the production of integrated circuits (IC), flat display devices (LCD, LED, OLED), solar cells and other electronic industries.

 

Generally, the semiconductor production industry divides gases into two types: common gases and special gases. Among them, the commonly used gas refers to a centralized supply and uses a lot of gas, such as N2, H2, O2, Ar, He, etc. Specialty gases refer to some chemical gases used in the semiconductor production process, such as extension, ion injection, blending, washing, and mask formation, that is, electronic gases in the gas category, such as high-purity SiH4, PH3, AsH3, B2H6, N2O, NH3, SF6, NF3, CF4, BCl3, BF3, HCl, Cl2, etc. In the IC production process, there are almost 100 kinds of electronic gases used, and about 30 kinds are common in the core section. It is these gases that make silicon chips have semiconductor properties through different manufacturing processes, which in turn determine the performance, integration, and yield of integrated circuits. Even if a certain specific impurity exceeds the standard, it will cause serious quality defects. In severe cases, the entire production line will be contaminated due to the diffusion of unqualified gases, and even the production will be completely paralyzed. Therefore, electronic gas is a key basic material in the electronic manufacturing process, and it is a veritable "blood" of the electronic industry.

 

The raw materials of electronic gas are mainly air separation gas, low-purity raw material gas produced in the production process of petrochemical and coal chemical industry, waste gas and other basic chemical raw materials. The main raw material sources are extensive and the market supply is sufficient, and it is relatively easy to obtain from relevant raw material suppliers. my country's large steelmaking enterprises and chemical fertilizer enterprises are basically equipped with air separation equipment, and the supply of air separation gas is large and the price is stable. The consumption of raw material gas of electronic special gas accounts for a small proportion of the output of petrochemical and coal chemical raw material gas. The stable petrochemical and basic chemical industries can provide sufficient raw materials for the electronic special gas industry. The "Thirteenth Five-Year Plan" further clarifies environmental protection and industrial waste gas emission targets, and the supply of upstream industries will be more sufficient. Because gas containers can be used for a long time, they account for a relatively low proportion of electronic gas costs, and price fluctuations have little impact on the industry.